Penentukan Indeks Bias Lapisan Tipis dengan menggunakan Ellipsometer
Abstract
Penelitian amorphous silicon film tipis yang pelapisnya dilakukan di atas bahan semi transparan dan non transparan. Dengan menggunakan Ellipsometer menghasilkan pengukuran yang sangat akurat, dan dengan menggunakan komputer program hasil percobaan diolah serta dibandingkan antara pengukuran dilakukan sebelumnya.
Keywords
lapisan tipis; indeks bias; ellipsometer
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DOI: http://dx.doi.org/10.12962%2Fj24604682.v5i2.942
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